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LASER / CO

LASER / CO₂

Semicon. Wafer cleaning

C3100 (Ringframe Wafer Cleaning System)

  • The system removes the particulate contaminants on the surface of ring framed wafer.
  • All processes are automated by the cassette loading-unloading system.
  • < Ringframe Wafer Cleaning - 400P (Laser Cleaner) >