Our dry-cleaning technology is applied on producing high-tech products such as semiconductor, display, smart phone and etc. In the global market, its excellent performance is proven by numerous customers. We provide customers with solutions that use laser and CO₂ instead of water or chemical to remove different types of foreign matters or particles coming from the process of manufacturing the high-tech products.
Innovative
Manufacturing
Technology
Our 'EUV Mask Solution' stands as a core pillar demonstrating our advanced technological prowess. Following two successful joint development projects with a world-leading semiconductor enterprise, we achieved the commercialization of our 'EUV Mask Laser Baking' system. This breakthrough, along with our next-generation EUV Mask equipment currently under development, will serve as a powerful growth engine driving our expansion in the global market. Furthermore, building upon over 25 years of accumulated technological expertise, we have successfully expanded into the 'Chemical Metrology' sector, continuing to strengthen strategic collaborations with global chipmakers.
